https://nova.newcastle.edu.au/vital/access/ /manager/Index en-au 5 Feedback control of the atomic force microscope micro-cantilever for improved imaging https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:13111 Tue 25 Sep 2018 09:58:19 AEST ]]> A MEMS nanopositioner with thermal actuator and on-chip thermal sensor https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:12644 Tue 01 May 2018 12:14:58 AEST ]]> Q control of an atomic force microscope microcantilever: a sensorless approach https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:13904 Sat 24 Mar 2018 08:25:28 AEDT ]]> Development of a MEMS position transducer using bulk piezoresistivity of suspensions https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:20461 Sat 24 Mar 2018 08:06:55 AEDT ]]> Sensing bandwidth of electrothermal MEMS transducers in constant voltage and current modes https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:20460 Sat 24 Mar 2018 08:06:55 AEDT ]]> A comparison of two excitation modes for MEMS electrothermal displacement sensors https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:18065 Sat 24 Mar 2018 08:06:14 AEDT ]]> SNR improvement in MEMS electrothermal displacement sensors https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:20412 Sat 24 Mar 2018 08:00:52 AEDT ]]> Characterization of a 2-DoF MEMS nanopositioner with integrated electrothermal actuation and sensing https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:21060 Sat 24 Mar 2018 08:00:36 AEDT ]]> Improved electrothermal position sensing in MEMS with non-uniformly shaped heaters https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:21059 Sat 24 Mar 2018 08:00:36 AEDT ]]> Sensorless implementation of a PPF controller for active <i>Q</i> control of an AFM microcantilever https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:21082 Q) factor in the atomic force microscope (AFM), when operating in tapping mode, allows for an increase in imaging speed. Passive piezoelectric shunt control has several advantages over alternative methods of cantilever Q factor reduction. However, this technique uses a passive electrical impedance to modify the mechanical dynamics of the cantilever, which limits the amount of Q factor reduction achievable. This paper demonstrates that further reductions in the cantilever Q factor may be obtained with the use of an active impedance in the piezoelectric shunt control framework. The active impedance parameters are designed in such a way that the piezoelectric shunt controller emulates a positive position feedback controller in a displacement feedback control loop. A significant reduction in cantilever Q factor is obtained using an active impedance compared with that achieved with a passive impedance. The improvement in scan speed using this control technique is demonstrated with AFM images of a test sample.]]> Sat 24 Mar 2018 07:53:57 AEDT ]]> A readout circuit implementation to reduce the flicker noise in MEMS electrothermal sensors https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:25444 Sat 24 Mar 2018 07:32:01 AEDT ]]>